Compact grating interferometer for producing photoresist gratings with incoherent light
نویسندگان
چکیده
منابع مشابه
Compact grating interferometer for producing photoresist gratings with incoherent light.
An achromatic interferometer was developed to produce 1200-lines/mm crossed-line photoresist gratings with a mercury arc light source. It is a compact reflection system of outstanding stability. Alignment procedures are described. The most stringent requirement, coplanar alignment of two folding gratings, was accomplished with the aid of a Twyman-Green interferometer. The grating interferometer...
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ژورنال
عنوان ژورنال: Applied Optics
سال: 1987
ISSN: 0003-6935,1539-4522
DOI: 10.1364/ao.26.001100